Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 974324 | CMP | CONNECTOR,3CNDCT 30VAC 100MHZ | New OEM | Contact Us | |
| 974325 | CMP | CABLE,3METER AMPL | New OEM | Contact Us | |
| 974326 | CMP | ASSY,MECHANICAL PAD COND XDF | New OEM | Contact Us | |
| 974360 | CMP | BEARING,6804ZZ(SUS) | New OEM | Contact Us | |
| 974361 | CMP | BEARING,6807ZZ | New OEM | Contact Us | |
| 974507 | CMP | CLAMP,END SHAFT LH PAD COND RIGID XDF | New OEM | Contact Us | |
| 974512 | CMP | C/A, 15RACK2 SLOT2 I/O OUTPUT AB | New OEM | Contact Us | |
| 974513 | CMP | C/A, 15RACK2 SLOT1 I/O INPUT AB | New OEM | Contact Us | |
| 974514 | CMP | C/A, 15RACK2 SLOT1 I/O INPUT CD | New OEM | Contact Us | |
| 974517 | CMP | C/A, I/O INTERCONNECT MIO | New OEM | Contact Us | |
| 974582 | CMP | SCRW,SET 1/4-20X5/16 W/.040 316 SST | New OEM | Contact Us | |
| 974583 | CMP | SCRW,SET CUP 1/4-20X5/16 W/.040 TEFLON | New OEM | Contact Us | |
| 974683 | CMP | ASSY,CABLE FEMALE ERU TO AMP | New OEM | Contact Us | |
| 974689 | CMP | SNSR,CAPACITIVE 12M 8MM USHLD TEFLON | New OEM | Contact Us | |
| 974884 | CMP | C/A,SENSOR ERU | New OEM | Contact Us | |
| 974886 | CMP | ASSY,SNSR CAPT 12M 8MM USHLD TEFLON | New OEM | Contact Us | |
| 974887 | CMP | BOOT,ELECTRICAL ROTARY UNION | New OEM | Contact Us | |
| 974923 | CMP | FINGER,TALL ACTIVE WAND .060 | New OEM | Contact Us | |
| 974967 | CMP | ASSY,MANIFOLD 3NOZZLE | New OEM | Contact Us | |
| 975001 | CMP | NOZZLE,SPRAY 1/8NPTX1 316SST | New OEM | Contact Us | |
| 975002 | CMP | NOZZLE,SPRAY 1/8NPT #5 316SST | New OEM | Contact Us | |
| 975003 | CMP | FTG,ADJUSTABLE BALL 1/8NPTX1/8NPT 316SST | New OEM | Contact Us | |
| 975377 | CMP | SNSR,PROX 8MMDIA 2MM RNG NPN 3WIRE | New OEM | Contact Us | |
| 975700 | CMP | PIN,YOKE DRIVE LINE POLISH HEAD | New OEM | Contact Us | |
| 975765 | CMP | ASSY,ROLLER TYPE A | New OEM | Contact Us | |
| 975843 | CMP | MANIFOLD,VALVE 4PORT 1/2" | New OEM | Contact Us | |
| 975979 | CMP | PROTECTOR,GAUGE 1/2T MALE X 1/2T FEM | New OEM | Contact Us | |
| 976007 | CMP | SHIELD,EXTENDED SPRAY RING NOTCHED | New OEM | Contact Us | |
| 976499 | CMP | BEARING,DDL-149022 | New OEM | Contact Us | |
| 976706 | CMP | CNTRLR,I/O B3000-B | New OEM | Contact Us | |
| 976744 | CMP | RFK,REPLACE OBSOLETE LD/UNLD SWITCH | New OEM | Contact Us | |
| 976854 | CMP | SHAFT,ADAPTER APM | New OEM | Contact Us | |
| 976855 | CMP | KEY,3/16SQ +.000/-.002 .5L 316SST | New OEM | Contact Us | |
| 976858 | CMP | SHAFT,DRIVE ENDPOINT & APM | New OEM | Contact Us | |
| 976918 | CMP | CNTRLR,INDEX/DR 7.9A 115V V2.060 | New OEM | Contact Us | |
| 977055 | CMP | CNTRLR,FLOW 0-125ML/MIN W/12' CABLE | New OEM | Contact Us | |
| 977056 | CMP | CONTROLLER,FLOW 0-250ML/MIN W/12' CABLE | New OEM | Contact Us | |
| 977059 | CMP | BELT,BRUSH UPPER ARM 7700 | New OEM | Contact Us | |
| 977061 | CMP | BELT,BRUSH UPPER DRIVE 7700 | New OEM | Contact Us | |
| 977062 | CMP | BELT,BRUSH LOWER DRIVE 7700 | New OEM | Contact Us | |
| 977081 | CMP | ASSY,TENSIONER UPPER ARM 7700 | New OEM | Contact Us | |
| 977596 | CMP | CABLE,24AWG 4PAIR 25' CAT5 | New OEM | Contact Us | |
| 977672 | CMP | ASSY,POLISH HEAD SOLID PLATEN | New OEM | Contact Us | |
| 977922 | CMP | WELDMENT,CLAMP V-BAND REINF LATCH 316SST | New OEM | Contact Us | |
| 978101 | CMP | MANIFOLD,CHEM DISTRIBUTION TEFLON | New OEM | Contact Us | |
| 978366 | CMP | WELDMENT,COVER TOP XDF MV | New OEM | Contact Us | |
| 978367 | CMP | BASE,COVER TOP XDF MV | New OEM | Contact Us | |
| 978368 | CMP | ASSY, SHIELD ARM XDF MV | New OEM | Contact Us | |
| 978371 | CMP | SEAL,SHIELD ARM XDF MV | New OEM | Contact Us | |
| 978417 | CMP | DIAPHRAGM,SLURRY .074THK EPDM | New OEM | Contact Us | |
| 978559 | CMP | FAN,MTR UNIT REPLACEMENT | New OEM | Contact Us | |
| 978588 | CMP | ASSY,EGEE OPTIONAL SENSORS 200MM | New OEM | Contact Us | |
| 978605 | CMP | C/A,EGEE SENSOR OPTION1 200MM | New OEM | Contact Us | |
| 978647 | CMP | CARD,4PORT RS-232 INTERFACE | New OEM | Contact Us | |
| 978687 | CMP | MANF,SLURRY 29HOLE PDM | New OEM | Contact Us | |
| 978697 | CMP | POST, FRAME OUTSIDE CHASE SIDE R 200MM | New OEM | Contact Us | |
| 978703 | CMP | CBL ASSY,LONGVIEW 200MM | New OEM | Contact Us | |
| 978706 | CMP | C/A,SYSCON 200MM | New OEM | Contact Us | |
| 978721 | CMP | BRKT,2-CH SPLITTER 200MM | New OEM | Contact Us | |
| 978722 | CMP | BRKT,LONGVIEW 200MM | New OEM | Contact Us | |
| 978742 | CMP | ASSY,EGEE W/SENSORS 200MM | New OEM | Contact Us | |
| 978754 | CMP | DIAPHRAGM,WEAR RING RWR | New OEM | Contact Us | |
| 978756 | CMP | RING,CLAMP LOWER #1 W/TEFLON 3.1A | New OEM | Contact Us | |
| 978852 | CMP | 16.00SCREW,SET 4-40 X .75 MOD | New OEM | Contact Us | |
| 978895 | CMP | PIN, GUIDE EGEE 316SST 200MM | New OEM | Contact Us | |
| 978896 | CMP | PIN,MOUNT EGEE 316SST 200MM | New OEM | Contact Us | |
| 979116 | CMP | VALVE, SELENOID 3WAY NC 24VDC | New OEM | Contact Us | |
| 979227 | CMP | SHELF LOWER | New OEM | Contact Us | |
| 979228 | CMP | SHELF UPPER | New OEM | Contact Us | |
| 979382 | CMP | CABLE,SPECTROMETER TRIGGER CONTROL 9PIN | New OEM | Contact Us | |
| 979638 | CMP | MTR,STEPPER 500 LINE ENCODER | New OEM | Contact Us | |
| 979987 | CMP | COLLAR,THRU BRUSH 200MM | New OEM | Contact Us | |
| 01-4620 | GaSonics | CLAMP, NUT PLATEN 150mm | New OEM | Contact Us | |
| 00-672057-00 | CMP | PACK,20 WAFER CLIPS | New OEM | Contact Us | |
| 0100-101663 | CMP | AMPL,BRUSH SERVO | New OEM | Contact Us | |
| 0100-700045 | CMP | BRICK,DISCRETE | New OEM | Contact Us | |
| 0100-700359 | CMP | MODULE,INPUT ANALOG 4-20MA | New OEM | Contact Us | |
| 0100-700360 | CMP | MODULE,INPUT PLC KVC-16X | New OEM | Contact Us | |
| 0100-700363 | CMP | MODULE,OUTPUT ANALOG 0-10V | New OEM | Contact Us | |
| 0100-700364 | CMP | MODULE,PLC PWR DISTRIB | New OEM | Contact Us | |
| 0100-717408 | CMP | BRICK,ANALOG | New OEM | Contact Us | |
| 0100-737852 | CMP | MODULE,OUTPUT ANALOG 4-20MA MISTIC | New OEM | Contact Us | |
| 01-0196-01 | GaSonics | BRKT,MOTOR PIVOT | New OEM | Contact Us | |
| 01-0197-01 | GaSonics | ROLLER,CORE | New OEM | Contact Us | |
| 01-0251-01 | CMP | ROLLER, HARD | New OEM | Contact Us | |
| 0102-700999 | CMP | RELAY,OUTPUT BRD | New OEM | Contact Us | |
| 01-0462 | GaSonics | DOOR,CHAMBER,ONE TOOL POINT | New OEM | Contact Us | |
| 01-0507 | GaSonics | PLATE,6 IN VACUUM | New OEM | Contact Us | |
| 01-0508 | GaSonics | COVER,BOTTOM,6 IN,FIXED | New OEM | Contact Us | |
| 01-0509 | GaSonics | RING,LIFTER, 6 IN | New OEM | Contact Us | |
| 01-0515 | GaSonics | RING,LIFTER-WAFER(5 IN -8 IN) | New OEM | Contact Us | |
| 01-0585 | GaSonics | LOCATOR, WAFER,HARD ANODIZE | New OEM | Contact Us | |
| 01-0616 | GaSonics | FASTENER, CLAMP,PROCESS CHAMBER | New OEM | Contact Us | |
| 01-0617 | GaSonics | CLAMP, SHOWER HEAD | New OEM | Contact Us | |
| 01-0668 | GaSonics | LIFT CHAMBER ASSY,NW50 | New OEM | Contact Us | |
| 01-0697 | GaSonics | CHAMBER,LOWER | New OEM | Contact Us | |
| 01-0698 | Gasonics | CHAMBER,UPPER | New OEM | Contact Us | |
| 01-0699 | GaSonics | PLATE,BOTTOM,REACTOR CENTER ASSY | New OEM | Contact Us | |
| 0117-101701 | CMP | TRANSMITTER, PRESSURE PTX510-A088 0 | New OEM | Contact Us | |
| 01-2195 | GaSonics | LAMP HOLDER L3510 | New OEM | Contact Us |