Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 965019 | CMP | TUBING,PUR 5/32 YELLOW TRANSLUCENT | New OEM | Contact Us | |
| 965042 | CMP | CABLE, PS/2 CPU TO SERVSWITCH 10FT | New OEM | Contact Us | |
| 965287 | CMP | POWER SUPPLY,90-260VAC IN 24VDC 1A OUT | New OEM | Contact Us | |
| 965400 | CMP | VALVE,DIAPHRAGM,VACUUM TANK | New OEM | Contact Us | |
| 965404 | CMP | SHAFT,PISTON,LOAD/UNLOAD CUP | New OEM | Contact Us | |
| 965406 | CMP | SHAFT,GUIDE,LOWER | New OEM | Contact Us | |
| 965487 | CMP | FINGER, GRIPPER, 200MM, STYLE A | New OEM | Contact Us | |
| 966099 | CMP | SNSR,PROX 8MM THD SHLD 1.5MM RNG NPN | New OEM | Contact Us | |
| 966130 | CMP | PAD, WET, VACUUM | New OEM | Contact Us | |
| 966158 | CMP | BELT,TIMING,T5 78 TEETH | New OEM | Contact Us | |
| 966246 | CMP | BATTERY | New OEM | Contact Us | |
| 966260 | CMP | AC SERVO MOTOR(U AXIS) | New OEM | Contact Us | |
| 966318 | CMP | SENSOR, CYL, 2ND PAD COND | New OEM | Contact Us | |
| 966422 | CMP | VALVE,WET VACUUM | New OEM | Contact Us | |
| 966423 | CMP | VALVE,DRY VACUUM | New OEM | Contact Us | |
| 966440 | CMP | CABLE, MTR.PWR, RLR, BOX2 SCRUB | New OEM | Contact Us | |
| 966487 | CMP | TRANSDUCER, SMC | New OEM | Contact Us | |
| 966545 | CMP | GENERATOR,VACUUM,.5 I.D. | New OEM | Contact Us | |
| 966716 | CMP | SENSOR,ASSY,WAFER PRESENT | New OEM | Contact Us | |
| 966867 | CMP | BLOCK,STOPPER 7700J | New OEM | Contact Us | |
| 966881 | CMP | HOLDER,SHAFT 7700J | New OEM | Contact Us | |
| 966882 | CMP | PLATE,MTR 2 7700J | New OEM | Contact Us | |
| 966883 | CMP | PLATE,MTR 3 7700J | New OEM | Contact Us | |
| 966884 | CMP | PULLY,1 MOD 7700J | New OEM | Contact Us | |
| 966885 | CMP | PULLY,2 MOD 7700J | New OEM | Contact Us | |
| 966886 | CMP | PLATE,END | New OEM | Contact Us | |
| 966887 | CMP | SPINDLE,1 7700J | New OEM | Contact Us | |
| 966888 | CMP | COVER,BEARING (A) 7700J | New OEM | Contact Us | |
| 966889 | CMP | COLLAR,LABYRINTH | New OEM | Contact Us | |
| 966890 | CMP | HOUSING,SEAL (A) 7700J | New OEM | Contact Us | |
| 966891 | CMP | HOLDER,PAD (A) 7700J | New OEM | Contact Us | |
| 966892 | CMP | COVER,MTR 7700J | New OEM | Contact Us | |
| 966893 | CMP | FLANGE,SEAL 1 7700J | New OEM | Contact Us | |
| 966894 | CMP | SEAL,RING | New OEM | Contact Us | |
| 966895 | CMP | SEAL,FLANGE 2 7700J | New OEM | Contact Us | |
| 966896 | CMP | CAP,A | New OEM | Contact Us | |
| 966897 | CMP | GUARD,TUBE | New OEM | Contact Us | |
| 966899 | CMP | HOLDER,NOZZLE (1) | New OEM | Contact Us | |
| 966900 | CMP | HOLDER,NOZZLE (2) | New OEM | Contact Us | |
| 966902 | CMP | NOZZLE,(A) 7700J | New OEM | Contact Us | |
| 966903 | CMP | BELLOW,UPPER BRUSH ARM,7700J | New OEM | Contact Us | |
| 966906 | CMP | COLLAR,3 | New OEM | Contact Us | |
| 966907 | CMP | COLLAR,4 | New OEM | Contact Us | |
| 966940 | CMP | HOLDER, BEARING (B) 7700J | New OEM | Contact Us | |
| 966965 | CMP | Bellows B 7700J | New OEM | Contact Us | |
| 966968 | CMP | Holder Pad B 7700J | New OEM | Contact Us | |
| 966970 | CMP | Housing Seal B 7700J | New OEM | Contact Us | |
| 966971 | CMP | SEAL,1 7700J | New OEM | Contact Us | |
| 966973 | CMP | SPACER,R | New OEM | Contact Us | |
| 966974 | CMP | CASE,BEARING 7700J | New OEM | Contact Us | |
| 966975 | CMP | SHAFT,MAIN (B) 7700J | New OEM | Contact Us | |
| 966976 | CMP | STAND,MAIN (B) 7700J | New OEM | Contact Us | |
| 966977 | CMP | COVER,BEARING D 7700J | New OEM | Contact Us | |
| 967000 | CMP | RING, IDLER 7700J | New OEM | Contact Us | |
| 967002 | CMP | NUT,ADJUST 7700J | New OEM | Contact Us | |
| 967003 | CMP | PLATE,KEY 7700J | New OEM | Contact Us | |
| 967004 | CMP | ROLLER, HOLDER 1 7700J | New OEM | Contact Us | |
| 967005 | CMP | WASHER, FLAT 2 7700J | New OEM | Contact Us | |
| 967006 | CMP | COLLAR (B) 7700J | New OEM | Contact Us | |
| 967007 | CMP | SHAFT,ROLLER 7700J | New OEM | Contact Us | |
| 967008 | CMP | COVER,SEAL 7700J | New OEM | Contact Us | |
| 967009 | CMP | HOLDER,SEAL 7700J | New OEM | Contact Us | |
| 967010 | CMP | ROLLER, IDLING 1 770J | New OEM | Contact Us | |
| 967011 | CMP | PLATE,RING 7700J | New OEM | Contact Us | |
| 967040 | CMP | PIN,HINGE | New OEM | Contact Us | |
| 967041 | CMP | BRKT,HINGE | New OEM | Contact Us | |
| 967042 | CMP | BLOCK,HINGE 2 | New OEM | Contact Us | |
| 967043 | CMP | SCRW,BOWL (B) 7700J | New OEM | Contact Us | |
| 967044 | CMP | BLOCK,HINGE 1 | New OEM | Contact Us | |
| 967045 | CMP | HANDLE,A | New OEM | Contact Us | |
| 967046 | CMP | COVER,SUB (SRD-02) | New OEM | Contact Us | |
| 967047 | CMP | COVER,SUB (SRD-01) | New OEM | Contact Us | |
| 967048 | CMP | COVER,SUB (BU2-02) | New OEM | Contact Us | |
| 967049 | CMP | COVER,SUB (BU2-01) | New OEM | Contact Us | |
| 967050 | CMP | COVER,SUB (BU1-02) | New OEM | Contact Us | |
| 967051 | CMP | COVER,SUB (BU1-01) | New OEM | Contact Us | |
| 967173 | CMP | COVER, SENSOR, SRD, 7700J | New OEM | Contact Us | |
| 967174 | CMP | COVER, SENSOR 2 7700J | New OEM | Contact Us | |
| 967177 | CMP | JOINT,B | New OEM | Contact Us | |
| 967202 | CMP | WSHR,FLAT | New OEM | Contact Us | |
| 967231 | CMP | HOOD, UPPER 7700J | New OEM | Contact Us | |
| 967251 | CMP | ARM,CHUCK R4 LH & RH | New OEM | Contact Us | |
| 967846 | CMP | SWITCH,SERVSWITCH 8-PORT SLIM | New OEM | Contact Us | |
| 967881 | CMP | BRKT,MOUNT SERF SWITCH MV | New OEM | Contact Us | |
| 967983 | CMP | FUNNEL,HOSE MV | New OEM | Contact Us | |
| 968073 | CMP | AMPL,SERVSWITCH EXTENDER REV4 | New OEM | Contact Us | |
| 968277 | CMP | BEARING,5/ X 1/4 676 | New OEM | Contact Us | |
| 968369 | CMP | CONN,SPECTOGRAPH SMA TO SMA MV | New OEM | Contact Us | |
| 968371 | CMP | CORD,PWR 3COND SPECTROGRAPH MV | New OEM | Contact Us | |
| 968376 | CMP | LIGHT,ATTENUATOR SPECTROGRAPH MV | New OEM | Contact Us | |
| 968649 | CMP | RING,SPLASH GUARD MP1&MP3 WIDE SHIELD MV | New OEM | Contact Us | |
| 968650 | CMP | RING,SPLASH GUARD MP2&MP4 WIDE SHIELD MV | New OEM | Contact Us | |
| 968676 | CMP | TUBING,5/32 GREEN POLYURETHANE | New OEM | Contact Us | |
| 968704 | CMP | AMPLIFIER,12-24VDC 100MA NPN W/DUST CVR | New OEM | Contact Us | |
| 968705 | CMP | SENSOR,2-24VDC 100MA NPN DARK ON | New OEM | Contact Us | |
| 968830 | CMP | BEARING,8.628OD 5.906ID .984THK 55%CURVE | New OEM | Contact Us | |
| 968872 | CMP | GRIPPER,FINGER TALL TEL | New OEM | Contact Us | |
| 969078 | CMP | POWER, STRIP 125VAC 6 OUTLETS 15FT | New OEM | Contact Us | |
| 969101 | CMP | KIT,SHIM OPTICAL ENDPOINT PROBE MV | New OEM | Contact Us | |
| 969104 | CMP | CABLE,FIBER OPTIC PATCH LT SOURCE 5METER | New OEM | Contact Us |