Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 109054 | CMP | O-RING,210X3MM,NBR 70,PM200 | New OEM | Contact Us | |
| 110363 | CMP | BEARING,BALL,6X19X6MM,SST,,PM200/PM300 | New OEM | Contact Us | |
| 168652 | CMP | VALVE,THROTTLE CHECK,M5,PM200/PM300 | New OEM | Contact Us | |
| 196180 | CMP | O-RING,6X2MM,FKM,PM200 | New OEM | Contact Us | |
| 211621 | CMP | BELLOWS,HOSE,U,123 X 85MM,PM200 | New OEM | Contact Us | |
| 212104 | CMP | BRUSH,ROUND, 40X56,PM200 | New OEM | Contact Us | |
| 212603 | CMP | RING,V-TYPE,17.5-19MM,18MM,NBR,PM200 | New OEM | Contact Us | |
| 212622 | CMP | O-RING,32X1.5MM,NBR 70,PM200/PM300 | New OEM | Contact Us | |
| 219668 | CMP | PIN,DOWELL,2X10,SST | New OEM | Contact Us | |
| 220894 | CMP | SWITCH,PROXIMITY,INDUCTIVE,PNP,PM200/PM3 | New OEM | Contact Us | |
| 221703 | CMP | SEAL,RING,16X25 X3MM,STEEL,PM200 | New OEM | Contact Us | |
| 222928 | CMP | VALVE,PILOT,PNEU,3/2 WAY,PM200/PM300 | New OEM | Contact Us | |
| 225013 | CMP | VALVE,PRES RELIEF, NG 6/1/4 ,PM200 | New OEM | Contact Us | |
| 225092 | CMP | VALVE,PRESSURE RELIEF,PM200/PM300 | New OEM | Contact Us | |
| 227378 | CMP | VALVE,PRES RELIEF,NG 6/1/4,PM200/PM300 | New OEM | Contact Us | |
| 232550 | CMP | FTG,TEE,T-FILTER, MAINTENANCE KIT,PM200/PM300 | New OEM | Contact Us | |
| 232551 | CMP | VALVE,DIAPH,2PORT,A/O, 316 L, 240 BAR, P | New OEM | Contact Us | |
| 233097 | CMP | MOTOR,1.5NM,PM200 | New OEM | Contact Us | |
| 235502 | CMP | VALVE,DIAPH,3PORT,1/4NPT,PM200/PM300 | New OEM | Contact Us | |
| 238264 | CMP | SHIM,UNDER FOIL,D500,10 M,PM200 | New OEM | Contact Us | |
| 238266 | CMP | SHIM,UNDER FOIL,D500,50 M,PM200 | New OEM | Contact Us | |
| 238267 | CMP | SHIM,UNDER FOIL,D500,100 M,PM200 | New OEM | Contact Us | |
| 243800 | CMP | PIN,LOCATING,PEEK,PM200 | New OEM | Contact Us | |
| 246440 | CMP | BELT,TIMING,TOOTHED,SYNCHRONOUS,PM300 | New OEM | Contact Us | |
| 246441 | CMP | BELT, TIMING SYNCHRONOUS, L330 | New OEM | Contact Us | |
| 246442 | CMP | BELT,TIMING,SYNCHRONOUS,L225MM,W6MM,PM200 | New OEM | Contact Us | |
| 246449 | CMP | BELT,TIMING,W6MM,PM200 | New OEM | Contact Us | |
| 246469 | CMP | CNTRLR, STEPPING MOTOR, 24-30V DC, 2A, PM200 | New OEM | Contact Us | |
| 248777 | CMP | BELT,TIMING,SYNCHRONOUS,T5,L305MM,W16MM, | New OEM | Contact Us | |
| 950023 | CMP | ASSY,PULLEY IDLER | New OEM | Contact Us | |
| 950179 | CMP | BEARING,SPHERE,PAD,CONDITIONER | New OEM | Contact Us | |
| 950616 | CMP | MOTOR, GEARHEAD, 6:1 | New OEM | Contact Us | |
| 950623 | CMP | BASE,10 SLOT,120VAC,P/S | New OEM | Contact Us | |
| 950624 | CMP | BASE,5 SLOT,120VAC,P/S | New OEM | Contact Us | |
| 950625 | CMP | MOD.,INPUT,ANALOG VOLTAGE,4PT | New OEM | Contact Us | |
| 950639 | CMP | MTR,GEAR,24VDC,11.5 RAT | New OEM | Contact Us | |
| 950677 | CMP | TIMING BELT, T5, KEVLAR | New OEM | Contact Us | |
| 950701 | CMP | SENSOR, PROXIMITY | New OEM | Contact Us | |
| 950776 | CMP | LOAD CELL,INTEGRAL AMP | New OEM | Contact Us | |
| 950777 | CMP | TRANSDUCER, PRESSURE | New OEM | Contact Us | |
| 950973 | CMP | MODULE,OUTPUT,ANALOG CURRENT | New OEM | Contact Us | |
| 951113 | CMP | TERMINAL,PIN,TYPE II CRIMP | New OEM | Contact Us | |
| 951231 | CMP | CABLE,POWER,USA AMP 1 | New OEM | Contact Us | |
| 951246 | CMP | Cable, Bam to Micro I/O | New OEM | Contact Us | |
| 951287 | CMP | CYLINDER,AIR 5/16BX1/2 ST | New OEM | Contact Us | |
| 951289 | CMP | SWITCH,LIMIT SPST 7A | New OEM | Contact Us | |
| 951291 | CMP | ACTUATOR,ROLLER MICRO SWITCH | New OEM | Contact Us | |
| 951353 | CMP | FUSE,600VAC,45A | New OEM | Contact Us | |
| 951403 | CMP | FUSE, 10A, 250V | New OEM | Contact Us | |
| 951407 | GaSonics | FUSE,20A,500V | New OEM | Contact Us | |
| 951433 | CMP | ASSY,CABLE,PROXIMITY SNSR | New OEM | Contact Us | |
| 951462 | CMP | CONN ASSY 41 CONTACTS | New OEM | Contact Us | |
| 951483 | CMP | CABLE, MOTOR, POWER ROTATION 1 | New OEM | Contact Us | |
| 951484 | CMP | CABLE,MOTOR POWER,ROTATION 5 | New OEM | Contact Us | |
| 951493 | CMP | CABLE,MTR PWR,ROTATION 4 | New OEM | Contact Us | |
| 951544 | CMP | ASSY,CABLE LOAD CELL | New OEM | Contact Us | |
| 951547 | CMP | ASSY,SENSOR, PAD COND,ARM TABL | New OEM | Contact Us | |
| 951565 | CMP | HINGE, POSITION | New OEM | Contact Us | |
| 951583 | CMP | FUSE,250V,3.15A,5X20 | New OEM | Contact Us | |
| 951627 | CMP | ASSY,CABLE,ARM 1-VAC TRANSDUCER | New OEM | Contact Us | |
| 951634 | CMP | ASSY,CABLE ARM3 BACKFILL CNTRL | New OEM | Contact Us | |
| 951644 | CMP | ASSY,CABLE,ARM 4-LOAD CELL | New OEM | Contact Us | |
| 951654 | CMP | ASSY,CABLE,POWER 100 VAC,MHTA | New OEM | Contact Us | |
| 951681 | CMP | ASSY,SNSR WAFER LOSS, ARM #1 | New OEM | Contact Us | |
| 951695 | CMP | VALVE,PNEU. 1/4 NPT | New OEM | Contact Us | |
| 951734 | CMP | FTG, PLUG, 1/4 NPT, SST | New OEM | Contact Us | |
| 951787 | CMP | HOUSING, FILTER, SST | New OEM | Contact Us | |
| 951788 | CMP | FILTER,COALESCER ELEMENT | New OEM | Contact Us | |
| 951814 | CMP | RELAY,3POLE,24VDC COIL | New OEM | Contact Us | |
| 951815 | CMP | RELAY,DPDT 24VDC COIL | New OEM | Contact Us | |
| 951844 | CMP | POWER SUPPLY,120VAC,MIO | New OEM | Contact Us | |
| 952156 | CMP | CHAIN,DRIVE,.375P,160T,PUR | New OEM | Contact Us | |
| 952189 | CMP | DIA 9IN WB20 FILM WITH PSA II BACKING | New OEM | Contact Us | |
| 952216 | CMP | CABLE,EXTENSION,VGA | New OEM | Contact Us | |
| 952221 | CMP | SHIM,0.025THK,200MM,WFR CAR | New OEM | Contact Us | |
| 952225 | CMP | SHIM,0.508THK,200MM,WFR CAR | New OEM | Contact Us | |
| 952314 | CMP | SPINDLE UNIT NOS | New OEM | Contact Us | |
| 952386 | CMP | HEAD,BRISTLE PAD CONDITIONER | New OEM | Contact Us | |
| 952523 | CMP | SEAL,WAFER CARRIER | New OEM | Contact Us | |
| 952597 | CMP | GUIDE,SIDE DOOR | New OEM | Contact Us | |
| 952836 | CMP | ASSY,CARRIER HOME GAUGE | New OEM | Contact Us | |
| 952865 | CMP | TUBING,PPRO-TEFLON LINER,1/4 | New OEM | Contact Us | |
| 952880 | CMP | RETAINER,WAFER SEAL | New OEM | Contact Us | |
| 952928 | CMP | VALVE,3WAY,PNEU,SLURRY | New OEM | Contact Us | |
| 952965 | CMP | LABEL,952959 | New OEM | Contact Us | |
| 953091 | CMP | SPRING, TORSION, LEFT HELIX | New OEM | Contact Us | |
| 953092 | CMP | SPRING, TORSION, RIGHT HELIX | New OEM | Contact Us | |
| 953113 | CMP | ROLLER,DOOR DELRIN | New OEM | Contact Us | |
| 953394 | CMP | VALVE PNEU 16 STATION | New OEM | Contact Us | |
| 953439 | CMP | VALVE,PFA,440HP,1/2FTHD | New OEM | Contact Us | |
| 953511 | CMP | PUMP,HEAD,STANDARD L/S | New OEM | Contact Us | |
| 953643 | CMP | VALVE,HPV DIAPHRAGM,PNEU,2-WAY | New OEM | Contact Us | |
| 953662 | Speedfam | VALVE,ASSY,BACKFILL,BLOWOFF | New OEM | Contact Us | |
| 953663 | Speedfam | VALVE,ASSY,VACUUM | New OEM | Contact Us | |
| 954178 | CMP | SPRING | New OEM | Contact Us | |
| 954183 | CMP | CABLE,POWER,10FT | New OEM | Contact Us | |
| 954239 | CMP | CABLE,SIGNAL,10FT | New OEM | Contact Us | |
| 954982 | CMP | ASSY,COUPLING | New OEM | Contact Us | |
| 955009 | CMP | PACKING,CORD,.139 VITON | New OEM | Contact Us | |
| 955070 | CMP | FTG,ITN2HI,EJECT,VAC,1/4 PORTS | New OEM | Contact Us |