Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 969105 | CMP | CABLE,FIBER OPTIC PATCH SD1024 5METER | New OEM | Contact Us | |
| 969108 | CMP | CBL ASSY, SENTINEL ENDPOINT I/O | New OEM | Contact Us | |
| 969130 | CMP | RING,WEAR PET-P TX C11 | New OEM | Contact Us | |
| 969199 | CMP | BEARING,Z 10MM HINE | New OEM | Contact Us | |
| 969300 | CMP | C/A, PL75A-PL75 | New OEM | Contact Us | |
| 969503 | CMP | PLATE,MOUNT PAD COND LOWER DRIVE | New OEM | Contact Us | |
| 969539 | CMP | SNSR,SENTINEL 65-450CC/MIN | New OEM | Contact Us | |
| 969548 | CMP | SENSOR, SENTINEL 350-2000CC/MIN | New OEM | Contact Us | |
| 969572 | CMP | GRBX,7:1 PLNTY 16MM SHAFT W/ 5MM KEYWAY | New OEM | Contact Us | |
| 969573 | CMP | COUPLG,1.5ODX1.8L 16X10MM BORE W/KWY SST | New OEM | Contact Us | |
| 969581 | CMP | MANIFOLD, DVCNT 4 DUAL & 8 SINGLE VALVES | New OEM | Contact Us | |
| 969638 | CMP | CABLE,SERIAL TOUCHSCREEN DB9F-DB9M 10FT | New OEM | Contact Us | |
| 969710 | CMP | COLLAR,A | New OEM | Contact Us | |
| 969713 | CMP | CASE,MTR | New OEM | Contact Us | |
| 969725 | CMP | CYLINDER,SINE RODLESS | New OEM | Contact Us | |
| 969731 | CMP | BLOCK,HINGE 1 MIRROR | New OEM | Contact Us | |
| 969732 | CMP | BLOCK,HINGE 2 MIRROR | New OEM | Contact Us | |
| 969938 | CMP | CYLINDER,COMPACT LOW FRICTION | New OEM | Contact Us | |
| 969945 | CMP | BEARING,COMBINATION ? ANGULAR 7001A DB | New OEM | Contact Us | |
| 969946 | CMP | BEARING,SS 6802 ZZ | New OEM | Contact Us | |
| 969947 | CMP | NUT,U FINE FU01 SUS | New OEM | Contact Us | |
| 969953 | CMP | FTG,CONN THROUGH BORE | New OEM | Contact Us | |
| 969955 | CMP | O-RING,G110 | New OEM | Contact Us | |
| 969966 | CMP | WSHR,SPRING,M5,COATING | New OEM | Contact Us | |
| 969968 | CMP | WSHR,FLAT,COATING M5 | New OEM | Contact Us | |
| 969976 | CMP | GUIDE,LM | New OEM | Contact Us | |
| 969978 | CMP | RING,CROSS ROLLER (B) | New OEM | Contact Us | |
| 969979 | CMP | CYLINDER,COMPACT CDQSD25-75DCM-F9NVL | New OEM | Contact Us | |
| 969992 | CMP | O-RING,G80 | New OEM | Contact Us | |
| 969999 | CMP | O-RING,S15 | New OEM | Contact Us | |
| 970002 | CMP | SEAL,VARI TURCON ROTO TVM100100-Z80H | New OEM | Contact Us | |
| 970007 | CMP | KEY,PARALLEL KEGS4-15 | New OEM | Contact Us | |
| 970011 | CMP | BELT,TIMING URETHANE | New OEM | Contact Us | |
| 970012 | CMP | O-RING,G35 | New OEM | Contact Us | |
| 970013 | CMP | O-RING,S215 | New OEM | Contact Us | |
| 970014 | CMP | O-RING,P16 | New OEM | Contact Us | |
| 970022 | CMP | O-ring G90 | New OEM | Contact Us | |
| 970023 | CMP | O-ring G60 | New OEM | Contact Us | |
| 970024 | CMP | FOLLOWER,CAM | New OEM | Contact Us | |
| 970026 | CMP | VARISEAL,TURCON ROTO TVM300700-T01H | New OEM | Contact Us | |
| 970066 | CMP | SUPPORT,UNIT BUM-10 | New OEM | Contact Us | |
| 970068 | CMP | BEARING,RF-1980HH | New OEM | Contact Us | |
| 970094 | CMP | MOUNT,CYLINDER FREE CDU20-25D-F9NL | New OEM | Contact Us | |
| 970099 | CMP | HOLDER,PIN A | New OEM | Contact Us | |
| 970106 | CMP | PIN,FASTENER | New OEM | Contact Us | |
| 970225 | CMP | COVER,1 | New OEM | Contact Us | |
| 970226 | CMP | COVER,2 | New OEM | Contact Us | |
| 970227 | CMP | COVER,3 | New OEM | Contact Us | |
| 970228 | CMP | COVER,4 | New OEM | Contact Us | |
| 970327 | CMP | BRKT,SNSR ANTI ROTATION | New OEM | Contact Us | |
| 971948 | CMP | MOUNT,WAND R1 | New OEM | Contact Us | |
| 972021 | CMP | SENSOR,INDUCTIVE PROX 8MM UNSHLD 3MM NPN | New OEM | Contact Us | |
| 972178 | CMP | ROLLER,BAND 86D | New OEM | Contact Us | |
| 972219 | CMP | SPLINE,BALL 10MM X 115MM LONG | New OEM | Contact Us | |
| 972302 | CMP | SUPPORT SHELF LOWER | New OEM | Contact Us | |
| 972324 | CMP | RING,CLAMP DIAPHRAGM MDL C11 WEAR RING | New OEM | Contact Us | |
| 972380 | CMP | PLATE, MOUNTING C-11 WEAR RING MODULE | New OEM | Contact Us | |
| 972409 | CMP | ROTARY,UNION 9PORT RS | New OEM | Contact Us | |
| 972412 | CMP | ASSY,PAD COND 2 WAY CYLINDER XDF | New OEM | Contact Us | |
| 972414 | CMP | PLATE,MOUNT TOP PIVOT 2WAY CYL XDF | New OEM | Contact Us | |
| 972415 | CMP | PLATE,SUPPORT TOP PIVOT 2WAY CYL XDF | New OEM | Contact Us | |
| 972416 | CMP | PLATE,MOUNT 2WAY CYL XDF | New OEM | Contact Us | |
| 972417 | CMP | PIN,MOUNT 2WAY CYL XDF | New OEM | Contact Us | |
| 972418 | CMP | BOLT,ROD 2WAY CYL XDF | New OEM | Contact Us | |
| 972419 | CMP | PIN,ROD CLEVIS 2WAY CYL XDF | New OEM | Contact Us | |
| 972467 | CMP | ASSY,TRANSDUCER +/-5PSID 4-20MA W/FTG | New OEM | Contact Us | |
| 972712 | CMP | SHAFT,DRIVE WAFER HEAD MULTI PORT W/SEAL | New OEM | Contact Us | |
| 972837 | CMP | KIT,WEAR RING REPLACEMENT C-11 | New OEM | Contact Us | |
| 972912 | CMP | REGULATOR,ELECTRO PNEU 24VDC 0-14PSI | New OEM | Contact Us | |
| 973000 | CMP | GEARHEAD,RIGHT ANGLE 24MM 150:1 | New OEM | Contact Us | |
| 973010 | CMP | COUPLING,20MM BORE 6KWY X 24MM BORE 8KWY | New OEM | Contact Us | |
| 973011 | CMP | MOTOR,SERVO HIGH TORQUE W/RESOLVER PARKER | New OEM | Contact Us | |
| 973012 | CMP | DRIVE,DIGITAL SERVO CONTINUOUS CUR 6AMP | New OEM | Contact Us | |
| 973019 | CMP | REGULATOR, E/P A-T DISABLED HIGHER FLOW | New OEM | Contact Us | |
| 973029 | CMP | CONTROLLER,I/O B3000 F/W 02/01 OR LATER | New OEM | Contact Us | |
| 973141 | CMP | SHAFT,PAD COND XDF | New OEM | Contact Us | |
| 973142 | CMP | HOUSING,PAD COND XDF | New OEM | Contact Us | |
| 973143 | CMP | ASSY,PAD COND LOWER DRIVE XDF | New OEM | Contact Us | |
| 973158 | CMP | KEY, SQUARE PARALLEL 6X6X35MM | New OEM | Contact Us | |
| 973194 | CMP | ASSY,JOINT PIVOT COND RIGID XDF | New OEM | Contact Us | |
| 973195 | CMP | CLAMP,END SHAFT RH PAD COND RIGID XDF | New OEM | Contact Us | |
| 973196 | CMP | ARM,PAD COND RIGID XDF | New OEM | Contact Us | |
| 973199 | CMP | CLEVIS,JOINT PAD COND RIGID XDF | New OEM | Contact Us | |
| 973200 | CMP | SHAFT,JOINT PAD COND RIGID XDF | New OEM | Contact Us | |
| 973212 | CMP | SENSOR,6-24VDC NPN MAGNETORESISTIVE | New OEM | Contact Us | |
| 973272 | CMP | SHAFT,COUPLER PAD COND XDF | New OEM | Contact Us | |
| 973273 | CMP | BLOCK,PIVOT PAD COND XDF | New OEM | Contact Us | |
| 973380 | CMP | BAR,SPRAY PAD COND XDF | New OEM | Contact Us | |
| 973417 | CMP | ASSY,TUBE SPRAY PAD COND XDF | New OEM | Contact Us | |
| 973427 | CMP | ASSY,2 STATION MANF ORBITAL | New OEM | Contact Us | |
| 973429 | CMP | ASSY,3STATION MANF ORBITAL | New OEM | Contact Us | |
| 973529 | CMP | RING,CLAMP LOWER SST#5 WFR MODL 316L SST | New OEM | Contact Us | |
| 973835 | CMP | MTR,R4 UP/DN | New OEM | Contact Us | |
| 973836 | CMP | BRAKE,R4 UP/DN | New OEM | Contact Us | |
| 973853 | CMP | SPRING,REPLMNT EQPT ROBOT WRIST HOUSING | New OEM | Contact Us | |
| 974070 | CMP | KIT,ALIGNMENT TOOL PAD | New OEM | Contact Us | |
| 974083 | CMP | FILTER,AIR LARGE BOWL | New OEM | Contact Us | |
| 974084 | CMP | FILTER,AIR MEDIUM BOWL | New OEM | Contact Us | |
| 974113 | CMP | PLATE,WAFER MODL 316L SST W/SNSR HOLE | New OEM | Contact Us | |
| 974133 | CMP | GEARHEAD,RIGHT ANGLE 100:1RATIO 32MM | New OEM | Contact Us |