Turnkey

Wafer size: 8” to 3”, Notch or Flat type.
Reticle size: 6”or 5”
Magnification: 1/5
Illumination System: 2.0kV or 2.7kV
Alignment Source: i-Line
X-Y Stage
Auto Focus
Wafer Leveling
TV-Pre-alignment
Wafer Auto Feeder
Reticle Changer
Option:
- Reticle Barcode reader
- Pellicle Particle Checker
- Chuck Maintenance Tool
- Triple HD or Dual HD