Turnkey
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Canon FPA-3000 i5/ i5+ stepper.
- Wafer size: 8” to 3”, Notch or Flat type.
- Reticle size: 6”or 5”
- Magnification: 1/5
- Illumination System: 2.0kV or 2.7kV
- Alignment Source: i-Line
- X-Y Stage
- Auto Focus
- Wafer Leveling
- TV-Pre-alignment
- Wafer Auto Feeder
- Reticle Changer
- Option:
- Reticle Barcode reader
- Pellicle Particle Checker
- Chuck Maintenance Tool
- Triple HD or Dual HD