Turnkey

Canon Aligner MPA600FA Super

• Wafer size: 100mm ,125mm or 150mm , Flat wafers
• Resolution: 1.5um (6” wafer surface)
• Depth of focus: More than +/- 6 um at linewidth 1.5um
• Distortion: ≦0.5um
• Astigmatism: less than 2.0 μm
• Uniformity: less than +/- 3%
• Intensity: More than 500+/-50 mw/cm²
• Pre-alignment accuracy: less than Ø100um
• Auto alignment: 3σ≦0.54um
• Throughput: 75 wafer/hours (6” wafer, exposure time:16 sec, Alignment time: 7 sec )

Canon Aligner MPA600FA

• Wafer size: 100mm ,125mm or 150mm , Flat wafers
• Resolution: 1.5um (6” wafer surface)
• Depth of focus: More than +/- 6 um at linewidth 1.5um
• Distortion: ≦0.5um
• Astigmatism: less than 2.0 μm
• Uniformity: less than +/- 3%
• Intensity: More than 500+/-50 mw/cm²
• Pre-alignment accuracy: less than Ø100um
• Auto alignment: 3σ≦0.54um
• Throughput: 75 wafer/hours (6” wafer, exposure time:16 sec, Alignment time: 7 sec )