新進庫存清冊
| No | Category | Tool Name | Maker | Model | Size | Vintage |
| F8 | LITHOGRAPHY | COATER | DNS | SC-80BW-AV | 8 | |
| F9 | LITHOGRAPHY | COATER | DNS | SK-80BW-AV | 8 | |
| F10 | LITHOGRAPHY | DEVELOPER | DNS | SD-80BW-AVQ | 8 | |
| F11 | LITHOGRAPHY | DEVELOPER | TEL | Mark-7 | 4 | |
| F14 | LITHOGRAPHY | STEPPER | CANON | FPA3000i5+ | 8 | |
| F16 | LITHOGRAPHY | STEPPER | NIKON | NSR-2005i9C | 6 | |
| F28 | ETCHER | ETCHER | KEM | λ-200ZE | 8 | |
| F33 | IMPLANTER | HIGH_CURRENT_IMPLANTER | VARIAN | VIISion 200+ | 8 | |
| M40 | MODULE | DRY PUMP | EDWARDS | iXH1820 | ||
| M41 | MODULE | DRY PUMP | EDWARDS | iXH610 |