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Canon Aligner MPA600FA Super

Canon Aligner MPA600FA Super

  • Wafer size: 100mm ,125mm or 150mm , Flat wafers
  • Resolution: 1.5um (6” wafer surface)
  • Depth of focus: More than +/- 6 um at linewidth 1.5um
  • Distortion: ≦0.5um
  • Astigmatism: less than 2.0 μm
  • Uniformity: less than +/- 3%
  • Intensity: More than 500+/-50 mw/cm2
  • Pre-alignment accuracy: less than Ø100um
  • Auto alignment: 3σ≦0.54um
  • Throughput: 75 wafer/hours (6” wafer, exposure time:16 sec, Alignment time: 7 sec )
Canon Aligner MPA600FA

Canon Aligner MPA600FA

  • Wafer size: 100mm ,125mm or 150mm , Flat wafers
  • Resolution: 1.5um (6” wafer surface)
  • Depth of focus: More than +/- 6 um at linewidth 1.5um
  • Distortion: ≦0.5um
  • Astigmatism: less than 2.0 μm
  • Uniformity: less than +/- 3%
  • Intensity: More than 500+/-50 mw/cm2
  • Pre-alignment accuracy: less than Ø100um
  • Auto alignment: 3σ≦0.54um
  • Throughput: 75 wafer/hours (6” wafer, exposure time:16 sec, Alignment time: 7 sec )