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Renovate‧Accessories
| ID | Maker | No | Tool | Model | Size |
| 1 | ASSY, R2-PRIME DTCU, POLY DPS | M1 | MODULE | AMAT | 0010-38755 |
| 2 | Decel P/S | M2 | MODULE | VARIAN | E15000071 |
| 3 | Electron Flood&Bias P/S | M3 | MODULE | VARIAN | E104788002 |
| 4 | High Energy | M4 | MODULE | VARIAN | E11075901 Rev.E |
| 5 | HV GATE VALVE DN 100 (4") | M5 | MODULE | VAT | 14040-PE34-0006 |
| 6 | Inspection Controller | M6 | MODULE | FURKE | 4690016 |
| 7 | NB USE l/l CHAMBER | M7 | MODULE | AMAT | 0270-76085 |
| 8 | P5000 CVD Board | M8 | MODULE | AMAT | 0020-09885 |
| 9 | P5000 CVD Board | M9 | MODULE | AMAT | 0200-09027 |
| 10 | P5000 CVD Board | M10 | MODULE | AMAT | 3870-01212 |
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